High-purity Silicon tetrachloride (TET)
The silicon tetrachloride stainless container is a high-purity container made of 316L stainless steel. It comes in three sizes: 45L, 250L, and 900L, which can hold 45kg,300kg, and 1000kg products respectively. Two available valves are 1/2" and 1/4" VCR interface valve. Different packaging and interfaces can be provided according to user requirements.
Technical data
|
Gas name |
Silicon tetrachloride（SiCl4） |
|
Ingredient or Impurity Names |
Product Specifications |
|
Purity |
≥99.9999% |
|
Resistivity |
≥500 ohm.cm |
|
Other chlorosilanes |
<1ppm/w |
|
Carbon(C) |
<0.2ppb/w |
|
Donor(As+P) |
≤0.08ppb/w |
|
Boron(B) |
≤0.1ppb/w |
|
Iron(Fe) |
<2ppb/w |
|
Nickel(Ni) |
≤2ppb/w |
|
Chromium(Cr) |
≤1ppb/w |
