High-purity Trichlorosilane（TCS）
Product Description:
The packaging for Trichlorosilane is made of 316L stainless steel. There are three sizes available,45L,250l,and 900L,and two valve sizes available,1/2”、and 1/4”VCR interface valve. The container can hold 45kg,250kg, and 1000KG of products respectively. Different packaging and interfaces can also be provided according to the specific requirements of the user, Including ISO-TANK.
Technical Data Sheet
|
Gas Name |
Trichlorosilane (SiHCl3) |
|
Ingredient or Impurity Names |
Product specifications |
|
Purity |
≥99.99% |
|
Resistivity |
≥1000 ohm.cm |
|
Other chlorosilanes |
≤100 ppm/w |
|
Carbon（C） |
≤5 ppb/w |
|
Donor（As，P） |
≤0.07 ppb/w |
|
Boron（B） |
≤0.01 ppb/w |
|
Iron(Fe) |
≤1 ppb/w |
|
Nickel（Ni） |
≤0.1 ppb/w |
|
Chromium（Cr） |
≤0.1 ppb/w |
